Brooks offers mass flow controllers, variable area flow meters, and vaporization solutions designed for precise process control across semiconductor, life science, and industrial markets.
Precision Flow Solutions by Brooks
FLW, Inc. proudly supports Brooks Instrument’s industry-leading portfolio, including mass flow controllers and meters for gas flow accuracy, variable area flow meters for liquid and gas monitoring, and pressure and vacuum products built for stability and control. We also offer vaporization systems for precise gas delivery. Our team helps customers select and integrate the right Brooks solutions for demanding applications.
Mass Flow Controllers & Meters
Ensure accurate gas flow control with Brooks’ thermal and Coriolis mass flow controllers—ideal for precision-critical industrial and semiconductor processes.
Variable Area Flow Meters
Reliable, easy-to-read variable area flow meters for monitoring gas and liquid flow in lab, process, and OEM applications—built for durability and accuracy.
Pressure & Vacuum Products
Brooks pressure controllers and vacuum instruments deliver stable, responsive control for demanding applications in process, research, and manufacturing.
Vaporization Products
Optimize gas delivery with Brooks vaporization systems—ideal for converting liquid to vapor in precise, repeatable applications across critical industries.
FEATURED PRODUCT
Brooks® SLA5800 Series Mass Flow Controller
The Brooks® SLA5800 Series is a high-performance thermal mass flow controller designed for precise, repeatable gas flow control in semiconductor, biotech, and industrial applications. Key features include:
High Accuracy & Stability
Delivers precise flow control with excellent long-term repeatability.
Multi-Gas, Multi-Range Flexibility
Configure for different gases and flow rates without hardware changes.
Digital Communication Options
Supports EtherNet/IP™, DeviceNet™, PROFIBUS®, and more for seamless system integration.
Cleanroom-Ready Design
Corrosion-resistant and ultra-clean, ideal for high-purity or harsh environments.
Need More Support?
Learn more about our full-service solutions and systems to help you every step of the way.